TY - CONF A1 - Lange, Nele A1 - Dietrich, Paul A1 - Holzweber, Markus A1 - Lippitz, Andreas A1 - Unger, Wolfgang A1 - Kulak, N. T1 - Functionalization of Silicon Nitride T2 - PhD Retreat 2015 T2 - PhD Retreat 2015 CY - Wandlitz, Germany DA - 2015-06-05 PY - 2015 AN - OPUS4-33486 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -