TY - JOUR A1 - Ortel, Erik A1 - Kraehnert, R. A1 - Galbert, F. A1 - Hodoroaba, Vasile-Dan T1 - Thin film porosity determined by X-rays at SEM T2 - Microscopy and microanalysis N2 - Various applications such as automotive catalysts, photocatalysis and sensors rely on thin coatings with high active surface area. The development of new and improved coatings requires in-depth understanding of the film morphology and texture. Especially the film porosity is a key parameter to identify structure-property relationships in applications. However, an accurate porosity determination of thin porous coatings is a challenging. In this contribution we present and discuss a new approach for determining the porosity of films by x-rays at SEM. PB - Cambridge University Press CY - New York, NY KW - Thin film KW - Porosity KW - EDX KW - SEM KW - Stratagem KW - WDX PY - 2015 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/34162 AN - OPUS4-34162 SN - 1431-9276 SN - 1435-8115 VL - 21 IS - Suppl. 3 SP - Paper 0852, 1707 EP - 1708 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany