TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, Ch. A1 - Krausz, F. T1 - Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps JF - Applied surface science KW - Laser micromachining KW - Subpicosecond laser ablation KW - Barium aluminium borosilicate glass PY - 1998 SN - 0169-4332 SN - 1873-5584 IS - 127-129 SP - 892 EP - 898 PB - North-Holland CY - Amsterdam AN - OPUS4-887 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -