TY - CONF A1 - Krüger, Jörg T1 - Femtosecond Laser Micromachining: Potentials, Applications, Safety Aspects T2 - Materials Seminar Series, Paul Scherrer Institut T2 - Materials Seminar Series, Paul Scherrer Institut CY - Villigen, Switzerland DA - 2003-05-19 PY - 2003 AN - OPUS4-4360 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -