TY - JOUR A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with silicon under water confinement JF - Thin solid films N2 - Femtosecond laser interaction with silicon was investigated in water and in air, with 130-fs laser pulses at 800 nm wavelength. Under water confinement, higher modification thresholds, lower ablation depths and similar incubation factors were found in comparison to the dry experiment. Morphological features of the laser-induced cavities also differed. In contrast to air experiments, debris redeposition was negligible, while the ablated material remained suspended in the water layer phase. Underwater cavities obtained at high fluences and high number of pulses per spot showed anomalous profiles, consistent with a strong spatial deformation of the laser beam coupled into the target. Ripples formed at the edges of the modified area showed varying spacings: f100 and f700 nm for water and air experiments, respectively. Differences to the air experiment were related to a complex combination of fluence-dependent non-linear effects occurring in the water layer and to pulse-number-dependent shielding effects induced by cavitation bubbles and suspended ablated material. KW - Laser ablation KW - Silicon KW - Solid electrolyte interface KW - Water PY - 2004 DO - https://doi.org/10.1016/j.tsf.2004.04.043 SN - 0040-6090 VL - 467 IS - 1-2 SP - 334 EP - 341 PB - Elsevier CY - Amsterdam AN - OPUS4-4008 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -