TY - JOUR A1 - Krüger, Jörg A1 - Niino, Hiroyuki A1 - Yabe, A. T1 - Investigation of excimer laser ablation threshold of polymers using a microphone JF - Applied surface science N2 - KrF excimer laser ablation of polyethylene terephthalate (PET), polyimide (PI) and polycarbonate (PC) in air was studied by an in situ monitoring technique using a microphone. The microphone signal generated by a short acoustic pulse represented the etch rate of laser ablation depending on the laser fluence, i.e., the ablation “strength”. From a linear relationship between the microphone output voltage and the laser fluence, the single-pulse ablation thresholds were found to be 30 mJ cm-2 for PET, 37 mJ cm-2 for PI and 51 mJ cm-2 for PC (20-pulses threshold). The ablation thresholds of PET and PI were not influenced by the number of pulses per spot, while PC showed an incubation phenomenon. A microphone technique provides a simple method to determine the excimer laser ablation threshold of polymer films. KW - Laser ablation KW - Polymer KW - Treshold KW - Microphone KW - Acoustic measurement KW - Incubation PY - 2002 DO - https://doi.org/10.1016/S0169-4332(02)00418-X SN - 0169-4332 SN - 1873-5584 VL - 197-198 SP - 800 EP - 804 PB - North-Holland CY - Amsterdam AN - OPUS4-1920 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -