TY - CONF A1 - Krüger, Jörg A1 - Legall, Herbert A1 - Bonse, Jörn T1 - X-ray hazards and radiation protection aspects in ultrashort laser processing N2 - Ultrashort pulse laser micromachining at repetition rates of several hundreds of kHz allows a cost-effective high precision manufacturing, which makes this method attractive for many industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per laser pulse is low, for currently available high-repetition-rate laser systems the accumulated X-ray dose becomes significant and radiation safety must be considered. Influences of the processing parameters are discussed and radiation protection aspects will be outlined T2 - AKL’22 – International Laser Technology Congress CY - Aachen, Germany DA - 04.05.2022 KW - Ultrashort pulse laser processing KW - X-ray emission KW - Radiation protection PY - 2022 AN - OPUS4-54805 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -