TY - CONF A1 - Holzweber, Markus A1 - Senoner, Mathias A1 - Unger, Wolfgang A1 - Kollmer, F. T1 - BAM-L200: Anew type of refrence material for the determination of lateral resolution and the calibration of length scale T2 - Fachtagung Nano-Additive T2 - Fachtagung Nano-Additive CY - Berlin, Germany DA - 2012-11-19 PY - 2012 AN - OPUS4-27182 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -