TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Wirth, Thomas T1 - Pressure influence on the depth resolution of rf-glow discharge depth profiling of multilayer coatings T2 - Journal of analytical atomic spectrometry PB - Royal Society of Chemistry CY - London KW - rf system PY - 1999 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/794 AN - OPUS4-794 SN - 0267-9477 SN - 1364-5544 VL - 14 SP - 1533 EP - 1535 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany