TY - JOUR A1 - Hodoroaba, Vasile-Dan T1 - Instrumental performance parameters for specification and check of energy dispersive X-ray spectrometers as in the international standard ISO 15632 JF - Microscopy and microanalysis N2 - Simple procedures for specifying and checking the performance of energy dispersive X-ray spectrometers (EDS) have been since 2002 available in form of the international standard ISO 15632:2002 [1]. When specifying their spectrometers all major EDS manufacturers refer meanwhile to this standard. Main spectrometer parameters such as energy resolution can be determined as recommended in there. Just several years ago the Si-Li detector has been the mostly widespread type of detector. Since four-five years, silicon drift detector (SDD) EDS providing comparable (in many cases even better) energy resolutions at much higher count rates than the conventional Si-Li’s have got the breakthrough on the market. KW - ED-EPMA KW - WD-EPMA KW - (mu-)XRF KW - EDX PY - 2011 DO - https://doi.org/10.1017/S1431927611003941 SN - 1431-9276 SN - 1435-8115 VL - 17 IS - Suppl. 2 SP - 614 EP - 615 PB - Cambridge University Press CY - New York, NY AN - OPUS4-26750 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -