TY - JOUR A1 - Lippitz, Andreas A1 - Hübert, Thomas T1 - XPS investigations of chromium nitride thin films JF - Surface and coatings technology N2 - Cr–N film coatings were prepared by magnetron sputter deposition at different nitrogen partial pressures. The film characterisation by XRD and DTG gives average bulk compositions of Cr2N and CrN for the coatings. Highly sensitive XPS investigations were performed and the chemical and phase compositions of a film surface range of about 10 nm thickness was estimated quantitatively from the deconvoluted peak intensities. It is demonstrated that the composition of the surface of chromium nitride thin films differs from the core and is more complex in constitution. Not only chromium nitrides (Cr2N and CrN) but also chromium oxynitrides and chromium oxides (CrOx and CrOxHy) were detected. Metallic chromium was also found in films prepared at higher nitrogen flow. The concentration of the estimated phases shows dependence on film preparation and additional heat treatment. KW - XPS KW - ESCA KW - Physical vapour deposition (PVD) KW - CrN thin films PY - 2005 DO - https://doi.org/10.1016/j.surfcoat.2005.02.091 SN - 0257-8972 VL - 200 IS - 1-4 SP - 250 EP - 253 PB - Elsevier Science CY - Lausanne AN - OPUS4-10865 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -