TY - JOUR A1 - Fischer, Daniel A1 - Griepentrog, Michael A1 - Beck, Uwe A1 - Duwe, M. A1 - Quast, J.-H. A1 - Schneider, S. T1 - Effect of curvature of spherical microscopic indentations on the ellipsometric readout T2 - Journal of Vacuum Science & Technology B 37 N2 - The authors describe and interpret curvature-related changes to the ellipsometric readout. As model system for a concave curvature, a set of three spherical microscopic indents in silicon (100) of different sizes was prepared by instrumented indentation testing using a spherical indenter. For reference, these samples were characterized by AFM to reveal the topography of each structure. The concavelike indents were analyzed by Mueller-Matrix imaging ellipsometry to extract lateral intensity images of 12 elements of the Mueller-Matrix. As a result of the detailed analysis of the image elements m22, m23, and m14, it was possible to correlate intensity changes and symmetry properties to depolarization and cross polarization induced by the edge threshold and the curved surface of the indent. PB - American Vacuum Society KW - Spectroskopic Imaging KW - Mueller-Matrix imaging ellipsometry KW - Structural anomalies KW - Structural inhomogenities PY - 2019 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/49810 AN - OPUS4-49810 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-498105 VL - 37 IS - 6 SP - 062906-1 EP - 062906-5 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany