TY - CONF A1 - Goebbels, Jürgen A1 - Staude, Andreas A1 - Weidemann, Gerd A1 - Riesemeier, Heinrich A1 - Hilpert, U. A1 - Bartscher, M. T1 - Dimensional control of reference structures with computed tomography T2 - BESSY User Meeting 2007 T2 - BESSY User Meeting 2007 CY - Berlin, Germany DA - 2007-12-06 PY - 2007 AN - OPUS4-16368 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -