TY - CONF A1 - Ehrig, Karsten A1 - Bartscher, M. A1 - Goebbels, Jürgen A1 - Härtig, F. A1 - Kniel, K. A1 - Neukamm, M. A1 - Neuschaefer-Rube, U. A1 - Staude, Andreas ED - Denecke, M. ED - Walker, C. T1 - Dimensional control of micro components with synchrotron computed tomography T2 - 20th International congress on X-ray optics and microanalysis (Proceedings) T2 - 20th International congress on X-ray optics and microanalysis CY - Karlsruhe, Germany DA - 2009-09-14 KW - Synchrotron radiation KW - Computed tomography KW - Dimensional measurement KW - Micro components PY - 2010 SN - 978-0-7354-0764-0 SN - 0094-243X SP - 164 EP - 171 PB - American Institute of Physics AN - OPUS4-21293 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -