TY - CONF A1 - Bonse, Jörn A1 - Bachelier, G. A1 - Wiggins, S. M. A1 - Siegel, J. A1 - Solis, J. A1 - Sturm, Heinz T1 - Femtosecond Laser Ablation of Semiconductors: Dynamical, Structural and Morphological T2 - European Materials Research Society (EMRS), Spring Meeting, Symposium Q "Laser and Plasma Processing for Advanced Materials" T2 - European Materials Research Society (EMRS), Spring Meeting, Symposium Q "Laser and Plasma Processing for Advanced Materials" CY - Strasbourg, France DA - 2009-06-08 PY - 2009 AN - OPUS4-19465 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -