TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Kautek, Wolfgang T1 - Ablation experiments on polyimide with femtosecond laser pulses T2 - Applied physics A N2 - Some applications of polymer films require the microstructuring of partly uneven substrates. This cannot be achieved by conventional photolithography, usually performed with ultraviolet short-pulse lasers (excimer, fourth harmonic Nd:YAG). When processing thermally sensitive or undoped polymers with low optical absorption, the use of femtosecond laser pulses can improve the ablation precision, also reducing the heat-affected zone. Therefore, a Ti:sapphire laser system was employed to perform ablation experiments on polyimide (PI). The irradiated areas were evaluated by means of optical and scanning electron microscopy. Highly oriented ripple structures, which are related to the polarization state of the laser pulses, were observed in the cavities. The relationship between the ablation threshold fluence and the number of laser pulses applied to the same spot is described in accordance with an incubation model. PB - Springer CY - Berlin T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1999-07-19 KW - Polyimide KW - Laser KW - Ablation KW - Femtosecond laser PY - 1999 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/780 AN - OPUS4-780 SN - 0947-8396 VL - 69 IS - 7 SP - S395 EP - S398 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany