TY - CONF A1 - Bonse, Jörn A1 - Munz, Martin A1 - Sturm, Heinz A2 - Vajtai, R. T1 - Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air T2 - Nanotechnology 2003 N2 - Laser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti:sapphire femtosecond-pulses (800 nm, 130 fs, 10 Hz). As a result of the first laser pulses, several morphological changes (crater formation, rim formation, ripple structures and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy (SFM), allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height <20 nm, width ~300 nm) bordering the ablated crater. A Fourier-analysis of the multi-pulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth <100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, also material modifications were observed in the irradiated regions by means of the FFM technique. Within the ablated craters, local stiffness variations were found revealing an inhomogeneous material composition/structure as a consequence of the femtosecond pulse laser treatment. PB - SPIE, the International Society for Optical Engineering CY - Bellingham, Wash. T2 - Nanotechnology Conference 2003 CY - Maspalomas, Gran Canaria, Spain DA - 2003-05-19 KW - Femtosecond laser irradiation KW - Microstructure KW - Indium phosphide KW - Scanning/atomic force microscopy (SFM/AFM) KW - Stiffness KW - Laser induced periodic surface structures (LIPSS) PY - 2003 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/2865 AN - OPUS4-2865 UR - http://cat.inist.fr/?aModele=afficheN&cpsidt=15329222 SN - 0-8194-4978-4 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 5118 SP - 221 EP - 234 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany