TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Rohloff, M. A1 - Das, S. K. A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic surface structures: importance of transient excitation stages T2 - SPIE Conference on Optics+Optoelktronics 2011, Conference "Damage to VUV, EUV and X-ray Optics (XDAM3)" T2 - SPIE Conference on Optics+Optoelktronics 2011, Conference "Damage to VUV, EUV and X-ray Optics (XDAM3)" CY - Prague, Czech Republic DA - 2011-04-18 PY - 2011 AN - OPUS4-23549 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -