TY - GEN A1 - Bonse, Jörn T1 - Chemical and topographical changes upon sub-100-nm LIPSS formation on titanium alloy N2 - Laser-induced periodic surface structures (LIPSS) have gained remarkable attention as they represent a universal phenomenon that is often accompanying laser-processing. Such LIPSS enable a large variety of different surface functionalizations for applications in the fields of optics, fluidics, tribology, or medicine. Moreover, so-called “high spatial frequency LIPSS” (HSFL) provide an appealing and straightforward way for surface nanostructuring featuring spatial periods even below 100 nm – far beyond the optical diffraction limit. However, the imposed surface functionalities are usually caused by both, topographic and chemical surface alterations. For exploring these effects in detail, multi-method characterizations were performed here for HSFL on processed Ti- 6Al- 4V alloy upon irradiation with near-infrared ps-laser pulses (1030 nm wavelength, ~1 ps pulse duration, 1 – 400 kHz pulse repetition rate) under different laser and scan processing conditions. The sample characterization involved morphological and topographical investigations by scanning electron microscopy (SEM), atomic force microscopy (AFM), stylus profilometry (SP), and white light interference microscopy (WLIM), as well as near-surface chemical analyses by X-ray photoelectron spectroscopy (XPS), hard X-ray photoelectron spectroscopy (HAXPES) and depth-profiling time-of-flight secondary ion mass spectrometry (TOF-SIMS). The results allow to qualify the laser ablation depth, the geometrical HSFL characteristics and provide detailed insights into the depth extent and the nature of the ps-laser-induced near-surface oxidation. Significance for medical applications will be outlined. T2 - E-MRS Spring Meeting 2023 CY - Strasbourg, France DA - 29.05.2023 KW - Laser-induced periodic surface structures (LIPSS) KW - Ultrashort laser processing KW - Hard X-ray photoelectron spectroscopy (HAXPES) KW - Time-offlight secondary ion mass spectrometry (ToF-SIMS) KW - Ti6Al4V alloy PY - 2023 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/58531 AN - OPUS4-58531 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany