TY - GEN A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures on semiconductors and dielectrics T2 - EMRS Spring Meeting 2011, Symposium J "Laser materials processing for micro and nano applications" T2 - EMRS Spring Meeting 2011, Symposium J "Laser materials processing for micro and nano applications" CY - Nice, France DA - 2011-05-09 PY - 2011 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/23380 AN - OPUS4-23380 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany