@misc{BonseKruegerKauteketal.2000, author = {J{\"o}rn Bonse and J{\"o}rg Kr{\"u}ger and Wolfgang Kautek and J. M. Wrobel}, title = {Femtosecond pulse laser machining of InP wafers}, booktitle = {Laser applications in microelectronic and optoelectronic manufacturing V}, number = {3933}, isbn = {0-8194-3550-3}, issn = {1605-7422}, type = {bookpartcollection}, pages = {280 -- 287}, year = {2000}, }