TY - GEN A1 - Bonse, Jörn T1 - Analysis of femtosecond laser irradiation effects on amorphous hydrogenated hard carbon layers: Combining topometry, micro Raman spectroscopy and microsale mechanical indentation T2 - 11th International Conference on Laser Ablation (COLA 2011) T2 - 11th International Conference on Laser Ablation (COLA 2011) CY - Playa del Carmen, Mexico DA - 2011-11-13 PY - 2011 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/24189 AN - OPUS4-24189 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany