TY - CONF A1 - Bonse, Jörn A1 - Munz, Martin A1 - Sturm, Heinz T1 - Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air T2 - SPIE conference Nanotechnology Gran Canaria T2 - SPIE conference Nanotechnology Gran Canaria CY - Maspalomas, Spain DA - 2003-05-20 PY - 2003 AN - OPUS4-4081 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -