TY - CONF A1 - Bonse, Jörn A1 - Schillinger, H. A1 - Pahl, H.-U. A1 - Patel, R. A1 - Bovatsek, J. A1 - Desailly, R. A1 - Bulgakova, N.M. A1 - Endert, H. T1 - High Spped Laser Scribe Systems fpr Large Area Thin Film Solar Cells Manufacturing T2 - 24th European Photovoltaic Solar Energy Conference T2 - 24th European Photovoltaic Solar Energy Conference CY - Hamburg, Germany DA - 2009-09-21 PY - 2009 AN - OPUS4-20047 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -