TY - CONF A1 - Bonse, Jörn A1 - Grehn, M. A1 - Theiss, C. A1 - Schmitt, F. J. A1 - Kaltenbach, A. A1 - Eichler, H. J. T1 - Femtosecond laser-induced ablation of dielectrics T2 - Topical Meeting "Emerging Trends and Novel Materials in Photonics" of the International Comission for Optics T2 - Topical Meeting "Emerging Trends and Novel Materials in Photonics" of the International Comission for Optics CY - Delphi, Greece DA - 2009-10-07 PY - 2009 AN - OPUS4-20087 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -