TY - GEN A1 - Bonse, Jörn T1 - Femtosecond laser-induced modification and ablation of hydrogenated amorphous carbon films T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" CY - Strasbourg, France DA - 2012-05-12 PY - 2012 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/25522 AN - OPUS4-25522 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany