TY - CONF A1 - Bonse, Jörn A1 - Mann, Guido A1 - Krüger, Jörg A1 - Eberstein, M. A1 - Hainich, S. A1 - Marcinkowski, M. T1 - Femtosecond laser-induced removal of antireflection coatings from textured silicon wafers T2 - SiliconPV 2013, 3rd International Conference on Crystalline Silicon Photovoltaics T2 - SiliconPV 2013, 3rd International Conference on Crystalline Silicon Photovoltaics CY - Hamelin, Germany DA - 2013-03-25 PY - 2013 AN - OPUS4-28049 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -