TY - GEN A1 - Bonse, Jörn T1 - Femtosecond Laser Ablation of Semiconductors: Dynamical, Structural and Morphological T2 - European Materials Research Society (EMRS), Spring Meeting, Symposium Q "Laser and Plasma Processing for Advanced Materials" T2 - European Materials Research Society (EMRS), Spring Meeting, Symposium Q "Laser and Plasma Processing for Advanced Materials" CY - Strasbourg, France DA - 2009-06-08 PY - 2009 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/19465 AN - OPUS4-19465 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany