TY - CONF A1 - Beck, Uwe A1 - Wirth, Thomas A1 - Sahre, Mario A1 - Männ, Marion A1 - Gamer, Nadja A1 - Hoffmann, V. A1 - Hentschel, R. A1 - Brauneck, U. A1 - Mollenhauer, R. A2 - Berg, S. T1 - Reference coatings for gdoes depth profiling - Preliminary results of a VAMAS project T2 - Proceedings of the 7th International Conference on Plasma Surface Engineering (Surface & coatings technology 142/144) PB - Elsevier CY - Amsterdam T2 - 7th International Conference on Plasma Surface Engineering (PSE 2000) CY - Garmisch-Partenkirchen, Germany DA - 2000-09-17 PY - 2000 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/970 AN - OPUS4-970 SN - 0257-8972 IS - 142-144 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany