TY - CONF A1 - Beck, Uwe A1 - Männ, Marion ED - Fried, M. T1 - Ellipsometry and Standardisation - A Publicly Available Specification (PAS) for Ellipsometry, Measurement of Reference Coatings and Non-ideal Samples T2 - Proceedings of the 3rd International Conference on Spectroscopic Ellipsometry (Thin solid films 455/456.2004) T2 - 3rd International Conference on Spectroscopic Ellipsometry CY - Vienna, Austria DA - 2003-07-06 PY - 2003 SN - 0040-6090 VL - 455-456 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-2598 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -