TY - CONF A1 - Baudach, Steffen A1 - Beck, Uwe A1 - Arndt, Jürgen ED - Bräuer, G. T1 - Damage Analysis of Coating/Substrate Systems - Multiprobe Techniques for the Evaluation of Defects and Surface Topography from the Micrometer- to the Nanometer-Range T2 - Proceedings of the Eight International Conference on Plasma Surface Engineering (Surface & coatings technology 174/175.2003) T2 - 8th International Conference on Plasma Surface Engineering (PSE) CY - Garmisch-Partenkirchen, Germany DA - 2002-09-09 PY - 2002 SN - 0257-8972 VL - 174-175 IS - TuPSC25 SP - 265 PB - Elsevier CY - Amsterdam AN - OPUS4-1621 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -