TY - CONF A1 - Merkel, U. A1 - Nebauer, E. A1 - Österle, Werner A1 - Würfl, J. ED - Brueck, S. R. J. T1 - RTA-treated ohmic contacts to GaAs containing WSiN barriers T2 - Rapid thermal and integrated processing IV T2 - MRS Spring Meeting on Rapid Thermal and Integrated Processing CY - San Francisco, CA, USA DA - 1995-04-17 PY - 1995 SN - 1-558-99290-1 SN - 0272-9172 N1 - Serientitel: Materials Research Society symposium proceedings – Series title: Materials Research Society symposium proceedings IS - 387 SP - 431 EP - 436 PB - Materials Research Soc. CY - Pittsburgh, Pa. AN - OPUS4-2504 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -