TY - CONF A1 - Hodoroaba, Vasile-Dan A1 - Procop, Mathias A1 - Rackwitz, Vanessa T1 - Check and Specification of the Performance of EDS Systems attached to the SEM by Means of a New Test Material EDS-TM002 and an Updated Evaluation Software Package EDS Spectrometer Test (Version 3.4) T2 - Microscopy and Microanalysis 2013 T2 - Microscopy and Microanalysis 2013 CY - Indianapolis, IN, USA DA - 2013-08-04 PY - 2013 AN - OPUS4-28952 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -