TY - JOUR A1 - Unger, Wolfgang T1 - International standardization and metrology as tools to address the comparability and reproducibility challenges in XPS measurements T2 - Journal of Vacuum Science and Technology A N2 - The status of standardization related to x-ray photoelectron spectroscopy (XPS, ESCA) at ASTM International (Subcommittee E42.03) and ISO (TC 201) is presented and commented upon in a structured manner. The survey also identifies other active bodies, here VAMAS Technical Working Area 2 and the Surface Analysis Working Group at the International Meter Convention, contributing to prestandardization Research and metrology of XPS and reports their specific activities. It is concluded that existing standardization is delivering good practices in the use of XPS and has a high potential to avoid the recently observed erroneous use, misapplications, and misinterpretation by new and inexperienced users of the method—which seems to be the main reason for the “reproducibility crisis” in the field of XPS applications. A need for a more proactive publicizing of international documentary standards by experienced XPS users, specifically those who are involved in standardization, is identified. Because the existing portfolio of standards addressing the use of XPS is not complete, future standardization projects planned or already ongoing are mentioned. The way the standardization bodies are identifying future needs is shortly explained. PB - AVS KW - Standardisation KW - Comparability KW - Reproducibility KW - XPS KW - VAMAS KW - Metrology PY - 2020 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/50560 AN - OPUS4-50560 VL - 38 IS - 2 SP - 021201-1 EP - 021201-8 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany