TY - CONF A1 - Unger, Wolfgang A1 - Senoner, Mathias A1 - Wirth, Thomas T1 - The lateral resolution of ToF-SIMS analysed by means of an advanced nanoscale strip-pattern T2 - 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) T2 - 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) CY - Manchester, England DA - 2005-09-12 PY - 2005 AN - OPUS4-10872 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -