TY - CONF A1 - Hodoroaba, Vasile-Dan A1 - Feltin, N. T1 - Hybrid metrology for microscopy of nanoparticles N2 - This presentation is structured in two parts: i) Hybrid metrology by combining SEM with AFM (N. Feltin) and ii) hybridization and corelative microscopy by SEM, STEM-in-SEM, TEM, EDS, Auger Electron Microscopy, TKD and more (D. Hodoroaba). The first part is focused on the metrological part of the hybrid measurement SEM-AFM, the second part offers some further possibilities of correlative microscopy of nanoparticles based on practical examples. T2 - EMPIR nPSize Training Course "Metrology for Measurement of Nanoparticle Size by Electron Microscopy and Atomic Force Microscopy" CY - Online meeting DA - 27.10.2020 KW - Nanoparticles KW - SEM KW - AFM KW - Metrology KW - Particle size distribution KW - Correlative imaging KW - STEM-in-SEM (TSEM) PY - 2020 AN - OPUS4-51476 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -