TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. G. A1 - Kornev, R. A. A1 - Polyakov, V. S. T1 - Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials JF - Journal of radioanalytical and nuclear chemistry N2 - The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges. KW - Plasma chemistry KW - Modeling chemical reactions KW - Plasma enhanced chemical vapor deposition KW - Reduction of volatile chlorides and fluorides by hydrogen PY - 2020 DO - https://doi.org/10.1007/s10967-020-07295-2 VL - 326 IS - 1 SP - 407 EP - 421 PB - Springer CY - Dordrecht AN - OPUS4-51144 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -