TY - CONF A1 - Stockmann, Jörg M. A1 - Radnik, Jörg A1 - Bütefisch, S. A1 - Busch, I. A1 - Passiu, C. A1 - Rossi, A. A1 - Unger, Wolfgang T1 - A new reference material for the determination of the Field of View of Small Area XPS N2 - Small Area Photoelectron Spectroscopy (XPS) is a powerful tool for investigating small surface features. It is often unclear, if the signal in the spectrum is an unwanted contamination of the Field of View (FoV) or is it originated from outside. The reason is, that XPS-spectra are affected by beam shapes. Scheithauer proposed to measure Pt apertures of different diameters and normalize the Pt4f count rate by a second measurement on the Pt metal. New reference materials were developed and tested in the VAMAS TWA2 A22 Project. T2 - ECASIA 2019 CY - Dresden, Germany DA - 15.09.2019 KW - Reference material KW - Small Area XPS KW - Selected Area XPS KW - Small Spot XPS KW - Field of Analysis PY - 2019 AN - OPUS4-49236 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -