TY - CONF A1 - Güttler, B. A1 - Schiel, D. A1 - Danzebrink, H. A1 - Unger, Wolfgang A1 - Gross, Thomas A1 - Lippitz, Andreas A1 - Müller, J.-P. T1 - Physical and Chemical Characterization of Thermal and Native Siliconoxide layers on Silicon T2 - Symposium "Reference Materials for Technologies in the New Millenium" T2 - Symposium "Reference Materials for Technologies in the New Millenium" CY - Berlin, BAM, Germany DA - 2000-05-22 PY - 2000 SP - 1(?) EP - 7(?) AN - OPUS4-6924 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -