TY - GEN A1 - Senoner, Mathias A1 - Unger, Wolfgang A1 - Koenders, L. A1 - Wilkening, G. ED - Hasche, K. ED - Mirande, W. ED - Wilkening, G. T1 - Results of the inter-laboratory comparison "Determination of nanometric step heights with AFM" T2 - Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods T2 - 5th Seminar on Quantitative Microscopy ; 1st Seminar on Nanoscale Calibration Standards and Methods ; NanoScale 2001 CY - Bergisch Gladbach, Germany DA - 2001-11-15 PY - 2002 SN - 3-89701-840-3 SN - 0179-0609 N1 - Serientitel: PTB-Bericht: PTB-F – Series title: PTB-Bericht: PTB-F VL - F-44 IS - 44 SP - 70 EP - 77 PB - Wirtschaftsverl. NW CY - Bremerhaven AN - OPUS4-1327 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -