TY - RPRT A1 - Senoner, Mathias A1 - Unger, Wolfgang A1 - Powell, C. T1 - Surface chemical analysis - General procedures - Determination of lateral resolution T2 - Working Draft ISO Technical Report - ISO/PDTR 19319 KW - AES KW - Contrast transfer function KW - Imaging KW - ISO TC 201 KW - Lateral resolution KW - Performance of imaging instruments KW - Quality management systems KW - Simulation KW - SIMS KW - XPS PY - 2009 SP - 1 EP - 65 AN - OPUS4-19158 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -