TY - CONF A1 - Senoner, Mathias A1 - Wirth, Thomas A1 - Unger, Wolfgang T1 - A reference material for calibration and testing of instruments with nanometric lateral resolution T2 - SIMS Europe 2002 T2 - SIMS Europe 2002 ; 3rd European Workshop on Secondary Ion Mass Spectrometry CY - Münster, Germany DA - 2002-09-15 PY - 2002 SP - 58 AN - OPUS4-6841 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -