TY - CONF A1 - Senoner, Mathias A1 - Unger, Wolfgang A1 - Koenders, L. A1 - Wilkening, G. T1 - Accuracy of step height determination by Atomic Force Microscopy - results of an inter-laboratory comparison T2 - Proceedings of the 3rd International Conference European Society for Precision Engineering and Nanotechnology (euspen) T2 - 3rd International Conference European Society for Precision Engineering and Nanotechnology (euspen) CY - Eindhoven, The Netherlands DA - 2002-05-26 PY - 2002 SP - 773 EP - 776 AN - OPUS4-1415 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -