TY - CONF A1 - Unger, Wolfgang A1 - Wirth, Thomas T1 - N and C stoichiometry of metal nitride and carbide hard coatings T2 - CCQM Surface Analysis Working Group Meeting for 2004 T2 - CCQM Surface Analysis Working Group Meeting for 2004 CY - Sèvres, France DA - 2004-04-20 PY - 2004 AN - OPUS4-4609 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -