TY - CONF A1 - Unger, Wolfgang T1 - Controlled deposition from the gaseous phase: application of micro-surface analysis T2 - Marie Curie Actions: MINDE Micro and Nano Deposition (Course) European Academy of Surface Technology (EAST) T2 - Marie Curie Actions: MINDE Micro and Nano Deposition (Course) European Academy of Surface Technology (EAST) CY - Schwäbisch Gmünd, Germany DA - 2006-05-29 PY - 2006 AN - OPUS4-12452 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -