TY - CONF A1 - Reiners, Georg T1 - Standards for thin film technologies T2 - Proceedings of the Short Courses T2 - 5th International Symposium on Trends and New Applications in Thin Films ; TATF '96 CY - Colmar, France DA - 1996-04-01 KW - Normung KW - Dünnschichttechnologie PY - 1996 N1 - Serientitel: Le vide, les couches minces, Suppl. – Series title: Le vide, les couches minces, Suppl. VL - 279 IS - 179 SP - 1 EP - 23 PB - sfv CY - Paris AN - OPUS4-635 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -