FG Mikro- und Nanosysteme
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- Open Access (6)
Keywords
- Accelerometer (1)
- Acoustic electrostatic actuators (1)
- Acoustic transducers (1)
- Capacitors (1)
- Duffing oscillator (1)
- Electrostatic actuator (1)
- Electrostatics (1)
- Engineering (1)
- Force (1)
- Harmonic distortions (1)
- Integrated Optics (1)
- Integrated circuit modeling (1)
- Mathematical models (1)
- Micro Optics (1)
- Microfluidic devices (1)
- Microphones (1)
- Microspeaker (1)
- NEMS (1)
- Optical Information Transmission (1)
- Pull-in (1)
- Sensors (1)
- Thin fluid films (1)
- Transducers (1)
- equivalent-circuit model (1)
- microactuators (1)
- micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS (1)