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Awakowicz, Peter
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On the Physics of a Large CCP Discharge
(2016)
Eremin, Denis
;
Bienholz, Stefan
;
Szeremley, Daniel
;
Trieschmann, Jan
;
Ries, Stefan
;
Awakowicz, Peter
;
Mussenbrock, Thomas
;
Brinkmann, Ralf Peter
Numerical simulations of a microwave driven low pressure plasma
(2016)
Szeremley, Daniel
;
Mussenbrock, Thomas
;
Brinkmann, Ralf Peter
;
Eremin, Denis
;
Mitschker, Felix
;
Steves, Simon
;
Awakowicz, Peter
;
Kushner, Mark
Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD
(2018)
Kirchheim, Dennis
;
Wilski, Stefan
;
Jaritz, Montgomery
;
Mitschker, Felix
;
Oberberg, Moritz
;
Trieschmann, Jan
;
Banko, Lars
;
Brochhagen, Markus
;
Schreckenberg, Rabea
;
Hopmann, Christian
;
Böke, Marc
;
Benedikt, Jan
;
Arcos, Teresa de los
;
Grundmeier, Guido
;
Grochla, Dario
;
Ludwig, Alfred
;
Mussenbrock, Thomas
;
Brinkmann, Ralf Peter
;
Awakowicz, Peter
;
Dahlmann, Rainer
Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma
(2011)
Brinkmann, Ralf Peter
;
Oberrath, Jens
;
Awakowicz, Peter
;
Lapke, Martin
;
Musch, Thomas
;
Mussenbrock, Thomas
;
Rolfes, Ilona
;
Schulz, Christian
;
Storch, Robert
;
Styrnoll, Tim
;
Zietz, Christian
The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs
(2017)
Daksha, Manaswi
;
Derzsi, Aranka
;
Wilczek, Sebastian
;
Trieschmann, Jan
;
Mussenbrock, Thomas
;
Awakowicz, Peter
;
Donkó, Zoltán
;
Schulze, Julian
Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase
(2017)
Berger, Birk
;
Steinberger, Thomas
;
Schüngel, Edmund
;
Koepke, Mark
;
Mussenbrock, Thomas
;
Awakowicz, Peter
;
Schulze, Julian
Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma
(2018)
Trieschmann, Jan
;
Ries, Stefan
;
Bibinov, Nikita
;
Awakowicz, Peter
;
Mráz, Stanislav
;
Schneider, Jochen M.
;
Mussenbrock, Thomas
Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas
(2018)
Berger, Birk
;
You, Kwangho
;
Lee, Hyo-Chang
;
Mussenbrock, Thomas
;
Awakowicz, Peter
;
Schulze, Julian
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