Characterization of reclaimed GaAs substrates and investigation of reuse for thin film InGaAlP LED epitaxial growth
Author: | M. Engelhard, C. Klemp, M. Behringer, A. Rudolph, Oliver Skibitzki, Peter Zaumseil, Thomas Schröder |
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DOI: | https://doi.org/10.1063/1.4955333 |
ISSN: | 1089-7550 |
ISSN: | 0021-8979 |
Title of the source (English): | Journal of Applied Physics |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2016 |
Volume/Year: | 120 |
Issue number: | 4 |
First Page: | 045301 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |