Electron dynamics in low pressure capacitively coupled radio frequency discharges
Author: | Sebastian Wilczek, Julian SchulzeORCiD, Ralf Peter Brinkmann, Zoltan Donkó, Jan TrieschmannORCiD, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1063/5.0003114.1 |
Title of the source (English): | Journal of Applied Physics |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2020 |
Volume/Year: | 127 |
Issue number: | 18 |
Article number: | 181101 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |